Q150V S Plus

• Capable of achieving vacuum of 1 x 10⁻⁶ mbar
• Chromium target as standard
• Capable of sputtering non-oxidizing and oxidizing metals e.g. Cr, Ir, W, Al, Ti, Au, Pt.
• Touch and swipe capacitive screen
• USB port for upgrades and download of process log files
• Multiple-user profiles can be set up on one instrument
• 16GB of memory can store more than 1000 recipes
• Multi-colour LED visual status indicator

• Ultra-high-resolution magnification SEM and FIB-SEM

Product Information

Pump-down Vacuum: 1x10⁻⁶ mbar

Chromium target as standard

Capable of sputtering oxidizing and non-oxidizing metals e.g Cr, Ir, W, Al, Ti

Instrument case

585 mm W x 521 mm D x 410 mm H

(total height with coating head open: 650 mm)

Weight

32.4 kg (packed: 42 kg)

Packed dimensions

725 mm W x 660 mm D x 680 mm H

Work chamber

Borosilicate glass 150 mm ID x 133 mm H

Display

115.5mm W x 86.4mm H (active area), 640 RGB x 480 (display format), capacitive touch colour display

User interface

Full graphical interface with touch screen buttons, includes features such as a log of the last 1000 coatings and reminders for when maintenance is due.

Sputter target

Disc-style 57 mm Ø. A 0.3 mm thick chromium (Cr) is fitted as standard. V S and V ES versions only. Pt, Pt/Pd, Pt, Au, Au/Pd, Ni, Ag, Pd, Cu, Cr, W, Al, Ti, Fe, Ir, Co, Sn, Mo, Mg, Ta and ITO target options available in various thicknesses.

Specimen stage

50 mm Ø rotation stage with rotation speed of 8-20 rpm. 

Other stages available on request.